Positionierungssystem zur Nanoskaligen Positionierung

Details

Veröffentlichungs-Nr.

EP4722736

Anmeldetag

1. Oktober 2024

Veröffentlichung

8. April 2026

Rechtsraum

EP

IPC

(PARK YONMOOK et al.)

Abstract

The present invention relates to a positioning system (10') for nanoscale positioning. It comprises a support structure (12), a first translation axis (14') and a second translation axis (16'). The first translation axis extends along a first direction (x), for moving a processing object (20) along the first direction and has a first translation axis width (w1) in a second direction (y) perpendicular to the first direction. The second translation axis extends along the second direction, for moving a processing tool (30) for processing the processing object along the second direction. The first and second translation axes are arranged with a distance to each other in a third direction (z) perpendicular to the first and second directions and are connected to or part of the support structure. The positioning system is configured for moving the processing tool over the whole first translation axis width without colliding with the support structure.

Anmelder

Firma

Nanosurf AG

Land

🇨🇭 Schweiz