Optische Vorrichtung mit Geladenen Teilchen und Verfahren zur Beurteilung
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4723158
- Anmeldetag
- 2. Oktober 2024
- Veröffentlichung
- 8. April 2026
- Rechtsraum
- EP
- IPC
- (ZEIDLER DIRK et al.)(ASML NETHERLANDS BV et al.)
Abstract
A charged particle-optical device configured to direct a plurality of charged particle beams along respective beam paths towards a sample surface, the charged particle-optical device comprising:an objective lens arrangement having a plurality of electrode plates arranged to focus the plurality of charged particle beams onto the sample surface in a grid; anda deflector array located adjacent one of the plurality of electrode plates, wherein the deflector array is configured to deflect one or more of the plurality of charged particle beams so that at least one of the plurality of charged particle beams has a different pitch with respect to its nearest neighbors.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven