Folienlinsenkorrektoren, Ladungsträgerteilchenmikroskopsysteme damit und Zugehörige Verfahren

Details

Veröffentlichungs-Nr.

EP4723159

Anmeldetag

30. September 2025

Veröffentlichung

8. April 2026

Rechtsraum

EP

Abstract

Foil lens correctors, charged particle microscope systems including the same, and associated methods. In an example, a foil lens corrector is configured to generate an offsetting spherical aberration in a charged particle beam and includes a graphene foil. In an example, a CPM system includes a charged particle source and a foil lens corrector including a graphene foil. In an example, a method of operating a CPM system includes directing a charged particle beam to a specimen and operating a foil lens corrector to generate an offsetting spherical aberration in the charged particle beam. In an example, the charged particle beam is incident upon a foil of the foil lens corrector with a foil landing energy that is at least 5 keV and at most 80 keV and such that the charged particle beam is transmitted through the foil with a transmission ratio that is at least 20%.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA