Verfahren zur Bestimmung einer Apodisierungsmodifizierung einer Bezugsmarke zur Charakterisierung einer Pupille eines Optischen Systems

Details

Veröffentlichungs-Nr.

EP4726471

Anmeldetag

16. Februar 2026

Veröffentlichung

15. April 2026

Rechtsraum

EP

IPC

G03F1/44, G03F7/00

Abstract

A method of determining an apodization modification of a fiducial for characterizing a pupil of an optical system of an apparatus, the fiducial comprising a plurality of reflective areas, the method comprising obtaining an apodization characteristic of a first reflective area, wherein during nominal operation of the apparatus the first reflective area is arranged outside an illumination field of the apparatus; performing in-situ a first pupil measurement of the optical system by arranging the first reflective area within the illumination field; performing in-situ a second pupil measurement of the optical system by arranging a second reflective area of the fiducial within the illumination field, wherein during nominal operation of the apparatus the second reflective area is arranged within the illumination field; and determining the apodization modification of the fiducial based on the obtained apodization characteristic and the first and second pupil measurements.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete