System und Verfahren zur Beurteilung Geladener Teilchen
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4726765
- Anmeldetag
- 10. Oktober 2024
- Veröffentlichung
- 15. April 2026
- Rechtsraum
- EP
- IPC
- (ASML NETHERLANDS BV et al.)
Abstract
A charged particle assessment system comprising a sample holder configured to hold a sample having a surface; a charged particle-optical device configured to project a charged particle beam towards the sample, the charged particle-optical device being configured to deflect the charged particle beam over a part of the surface of the sample, the charged particle-optical device having a device surface, the device surface facing, in use, the surface of the sample; a projection assembly arranged to direct a plurality of light beams along respective light paths, wherein the plurality of light beams include light beams having different wavelengths; and wherein the device surface comprises a plurality of redirecting elements, each of the redirecting elements being associated with one of the respective wavelengths, wherein each of the redirecting elements is configured to direct light onto the sample.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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Vertreten von
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ASML Netherlands B.V.