Probenhalter, Probenhaltersatz, Probenfräsausrüstung und Festziehwerkzeug
Anmelder: JEOL Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4726767
- Anmeldetag
- 10. September 2025
- Veröffentlichung
- 15. April 2026
- Rechtsraum
- EP
- IPC
- H01J37/20(HUNT JOHN ANDREW et al.)
Abstract
There is provided a sample holder capable of restricting the positional deviation of a sample. The sample holder (100) is for use with sample milling equipment that mills the sample (2) by irradiating it with an ion beam (IB). The sample holder (100) includes a holder base (10), a sample holding portion (20) for holding the sample (2), and a positional securing portion (40) for securing the sample holding portion (20) in position. The positional securing portion (40) includes a shaft (42) connected to the sample holding portion (20), a first supportive member (44) providing rotatable support of the shaft (42), and a second supportive member (46) supporting the first supportive member (44) such that it can move along an axis perpendicular to the axis of the shaft (42). When the second supportive member (46) is rotated, the second supportive member (46) moves along the axis of the shaft (42), thus tightening together the sample holding portion (20) and the holder base (10) while rotation of the first supportive member (44) concomitant with the rotation of the second supportive member (46) is restricted.
Anmelder
- Firma
- JEOL Ltd.
- Land
- 🇯🇵 Japan
Japanisches Unternehmen mit Sitz in Tokio, das wissenschaftliche und industrielle Präzisionsgeräte entwickelt, darunter Elektronenmikroskope, Analysegeräte und Halbleiterfertigungsanlagen.
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Boult Wade Tennant LLP