Rasterelektronenmikroskop und Gradientenkartenerzeugungsverfahren

Details

Veröffentlichungs-Nr.

EP4726769

Anmeldetag

1. Oktober 2025

Veröffentlichung

15. April 2026

Rechtsraum

EP

IPC

H01J37/28, H01J37/244(OTSUKA TAKESHI et al.)

Abstract

A calculator (41) calculates gradient information based on a detection value set acquired from each micro-surface of a sample. A gradient map is formed from a plurality of sets of gradient information corresponding to a plurality of micro-surfaces. Each set of gradient information includes information which identifies an azimuth angle of each micro-surface. A corrector (42) corrects each set of gradient information so that the azimuth angle of each micro-surface is corrected according to a current sample observation condition. The azimuth angle and an inclination angle may be corrected sequentially or simultaneously.

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan

Fachgebiete