Substrathaltevorrichtung, Substratverarbeitungsvorrichtung und Verfahren zur Verarbeitung eines Substrats

Details

Veröffentlichungs-Nr.

EP4727324

Anmeldetag

22. September 2025

Veröffentlichung

15. April 2026

Rechtsraum

EP

IPC

H10P72/00, H10P72/78(MIYANARI ATSUSHI et al.)

Abstract

A substrate holding device includes a porous component, a supporting component, a rotation driver, and a holding driver. The porous component includes an adsorbing surface that adsorbs a film of a framed substrate. The supporting component surrounds the porous component and supports a frame of the framed substrate. The rotation driver rotates the supporting component and the porous component in unison. The holding driver includes at least one magnet disposed opposite to the frame with respect to the supporting component and separated from the supporting component, the holding driver compressively holding the frame against the supporting component by a magnetic force of the magnet.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan