Maskenlose Photolithographische Synthese

Details

Veröffentlichungs-Nr.

EP4729166

Anmeldetag

16. Oktober 2024

Veröffentlichung

22. April 2026

Rechtsraum

EP

Abstract

A system (100) for synthesizing copolymerized molecules on a substrate (10) includes: a light source (20) emitting exposure light; a programmable light direction unit (30) for redirecting the light in specific patterns; a substrate holder (40); a reagent delivery system (50) for dispensing reagents; and a lateral movement mechanism (60) for generating relative movement between the light direction unit and the substrate holder. A controller (70) controls: i) reagent dispensing; ii) light exposure in a first pattern; iii) relative movement and adjustment of the light direction unit to a second pattern; and iv) subsequent exposure in the second pattern.

Anmelder

Firma

Imec VZW

Land

🇧🇪 Belgien