Temperaturmesswafer und Substratverarbeitungssystem damit

Details

Veröffentlichungs-Nr.

EP4729901

Anmeldetag

18. Juli 2025

Veröffentlichung

22. April 2026

Rechtsraum

EP

IPC

G01K1/024, G01K1/143(DAON SYS CO LTD et al.)

Abstract

A temperature measurement wafer (1) includes a temperature sensor (3), a transmission unit (8), and a battery substrate (7). The transmission unit (8) wirelessly transmits temperature data of a temperature measurement subject measured by the temperature sensor (3) to the temperature measurement wafer (1). That is, the temperature measurement wafer (1) wirelessly transmits information to the outside, a decrease in operation efficiency caused by a communication wire can be avoided. The battery substrate (7) supplies power to each of the temperature sensor (3) and the transmission unit (8) using an all-solid-state secondary battery (21). Using the all-solid-state secondary battery (21) makes it possible to operate the temperature measurement wafer (1) without deteriorating its performance even under a higher temperature condition. Thus, the temperature measurement wafer (1) can be used under a higher temperature condition while improving the operation efficiency of the temperature measurement wafer (1).

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan