Messvorrichtung

Details

Veröffentlichungs-Nr.

EP4729906

Anmeldetag

12. Juni 2024

Veröffentlichung

26. Dezember 2024

Rechtsraum

EP

Abstract

This measuring device includes: a first piezoelectric element (20) and a second piezoelectric element (21); and a piezoelectric layer 40 which is provided in common for the first piezoelectric element (20) and the second piezoelectric element (21), and which includes a first partial piezoelectric layer (40A) and a second partial piezoelectric layer (40B). The first piezoelectric element (20) includes a first lower electrode (31), the first partial piezoelectric layer (40A) provided on the first lower electrode (31), a first upper electrode (33) provided on the first partial piezoelectric layer (40A), and an expansion/contraction suppression layer (34) provided on the first partial piezoelectric layer (40A) so as to cover the first upper electrode (33). The second piezoelectric element (21) includes a second lower electrode (35), the second partial piezoelectric layer (40B) provided on the lower electrode (35), and a second upper electrode (37) provided on the second partial piezoelectric layer (40B). The modulus of elasticity of the expansion/contraction suppression layer (34) is higher than that of the piezoelectric layer (40).

Anmelder

Firma

Toppan Holdings Inc.

Land

🇯🇵 Japan