Verfahren zur Kalibrierung eines Ertragsmodells, Zugehörige Vorrichtung und Computerprogramm

Details

Veröffentlichungs-Nr.

EP4730033

Anmeldetag

17. Oktober 2024

Veröffentlichung

22. April 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

Disclosed is a method for calibrating a prediction model for predicting a failure probability of a device manufactured by a semiconductor manufacturing process based on performance parameter data relating to a performance parameter of said device. The method comprises obtaining calibration performance parameter data and corresponding reference data; optimizing one or more calibration parameters of the prediction model so as to improve prediction performance of said prediction model,wherein said one or more calibration parameters comprises one or more of: an upper specification calibration parameter or an upper specification delta calibration parameter thereof, a lower specification calibration parameter or lower specification delta calibration parameter thereof, a scaling calibration parameter for scaling a scale parameter of the prediction model, a location parameter nuisance calibration parameter, a skewness calibration parameter and/or a kurtosis calibration parameter.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande