Integrierte Struktur mit Anodisierungsbarriereschicht auf einer Schutzhülle und Zugehöriges Verfahren

Details

Veröffentlichungs-Nr.

EP4730381

Anmeldetag

21. Oktober 2024

Veröffentlichung

22. April 2026

Rechtsraum

EP

IPC

(VOIRON FRÉDÉRIC et al.)

Abstract

An integrated structure comprising: a substrate (100, 101), a conductive layer, the conductive layer having a first cavity, the first cavity (102C) being filled with a first insulating region (103F), the first insulating region having a top surface flush with a top surface of the conductive layer to form a first planar surface (F1), a protective liner (104) on the top surface of the conductive layer and the top surface of the first insulating region, an anodization barrier layer (105) on the protective liner, the protective liner and the anodization barrier layer having a second cavity (105_104C) passing through the protective liner and the anodization barrier layer and opening onto the first insulating region, the second cavity being filled with a second insulating region (106F), the second insulating region having a top surface flush with a top surface of the anodization barrier layer to form a second planar surface (F2).

Anmelder

Firmen

Murata Manufacturing Co., Ltd.
Commissariat à l'Energie Atomique et aux Energies Alternatives

Land

🇯🇵 Japan