Mems-Vorrichtung mit Eingelassenen Kämmen
Anmelder: Murata Manufacturing Co., Ltd. 🇯🇵
Details
- Veröffentlichungs-Nr.
- EP4733248
- Anmeldetag
- 24. Oktober 2024
- Veröffentlichung
- 29. April 2026
- Rechtsraum
- EP
- IPC
- B81B3/00, B81C1/00, G01P15/125
Abstract
A microelectromechanical device comprising with a device layer and first and second comb structures. The bottom of the first comb structure has a z-coordinate which is greater than both the z-coordinate of the bottom face of the device layer and the z-coordinate of the bottom of the second comb structure. The top of the second comb structure has a z-coordinate which is smaller than both the z-coordinate of the top face of the device layer and the z-coordinate of the top of the first comb structure. The device layer also comprises a cavity which extends from the bottom face of the device layer to the bottom of the second comb structure.
Anmelder
- Firma
- Murata Manufacturing Co., Ltd.
- Land
- 🇯🇵 Japan
Japanisches Elektronikunternehmen mit Sitz in Kyoto. Murata entwickelt und produziert elektronische Bauelemente wie Kondensatoren, Sensoren und Kommunikationsmodule für Elektronikgeräte.
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