Drucksensor mit Hoher Erkennungsleistung und Optimierter Herstellung

Details

Veröffentlichungs-Nr.

EP4733729

Anmeldetag

15. Oktober 2025

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

G01L9/00, B81B3/00

Abstract

A pressure sensor (30) has a substrate (31); a deformable detection element (38) suspended on the substrate, extending at a distance from the substrate along a first direction (Z), and configured to undergo a deformation as a function of a pressure to be detected; and an anchoring structure (30) configured to support the deformable detection element (38) over the substrate. The anchoring structure has a plurality of anchoring portions (50) extending from the substrate (31), coupled to the deformable detection element (38), and arranged at a distance from each other along a second direction (Y) transversal to the first direction (Z); and a structural region (51) extending between the anchoring portions along the second direction (Y) and having at least one release opening (55).

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz

Fachgebiete