Probenverarbeitungsvorrichtung und Probenverarbeitungsverfahren

Details

Veröffentlichungs-Nr.

EP4733738

Anmeldetag

17. Oktober 2025

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

(NOMARU KEIJI et al.)

Abstract

A sample processing apparatus (100) that irradiates a sample (S) disposed in a sample chamber (12) with a processing beam to process the sample (S), the sample processing apparatus (100) includes: a processing beam source (30) that irradiates the sample (S) with the processing beam; a sample holder (50) that holds the sample (S); a sample stage (40) on which the sample holder (50) is mounted; and a shield (60) disposed in the sample chamber (12), wherein the sample holder (50) and the shield (60) form a container (2) that accommodates the sample (S), and the container (2) is provided with a window portion (64) that guides the processing beam into the container (2).

Anmelder

Firma

Jeol Ltd.

Land

🇯🇵 Japan