Verfahren zur Bestimmung einer Spektralen Gewichtung für Metrologieverfahren und Zugehörige Vorrichtungen

Details

Veröffentlichungs-Nr.

EP4733841

Anmeldetag

23. Oktober 2024

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

G03F7/20(ASML NETHERLANDS BV et al.)

Abstract

Disclosed is a method for determining a spectral weighting for configuring spectral characteristics of broadband measurement illumination. The method comprises obtaining first metrology data comprising metrology data from at least a first proper subset of a plurality of targets on a substrate, respectively for each of a plurality of different illumination conditions; determining a respective first spectral weighting component for each target of at least a second proper subset of targets from said first metrology data, said first spectral weighting component being determined to provide a substantially wavelength independent mean intensity from each respective said target; determining a respective second spectral weighting component for each target of at least the second proper subset of targets from said first metrology data; and determining a respective spectral weighting for each target of at least the second proper subset of targets from said first spectral weighting component and said second spectral weighting component.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete