Verfahren zur Bestimmung eines Brechungsindex einer Membran
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4733842
- Anmeldetag
- 25. Oktober 2024
- Veröffentlichung
- 29. April 2026
- Rechtsraum
- EP
- IPC
- G03F7/20, G03F7/00
Abstract
Method of determining a refractive index of a membrane associated with an image sensor, the method comprising the steps of obtaining a first diffraction pattern of a first patterned membrane section, the first patterned membrane section having a first membrane-to-open ratio, and obtaining a second diffraction pattern of a second patterned membrane section, the second patterned membrane section having a second membrane-to-open ratio, the second membrane-to-open ratio being different from the first membrane-to-open ratio, and determining a refractive index of the membrane based on the first diffraction pattern and the second diffraction pattern.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V · Veldhoven