Bestimmte Verbesserungen von Mehrstrahlerzeugungs- und Mehrstrahlablenkeinheiten

Details

Veröffentlichungs-Nr.

EP4734148

Anmeldetag

9. März 2021

Veröffentlichung

29. April 2026

Rechtsraum

EP

IPC

H01J37/147(MATSUMOTO HIROSHI et al.)(EASTHAM DEREK ANTHONY et al.)(PLATZGUMMER ELMAR et al.)(STEVENSON JAMES M et al.)(LEE HYUN HO et al.)

Abstract

Certain improvements of multi-beam raster units such as multi-beam generating units and multi-beam deflector units of a multi-beam charged particle microscopes are provided. The improvements include design, fabrication and adjustment of multi-beam raster units including apertures of specific shape and dimensions. The improvements enable multi-beam generation and multi-beam deflection or stigmation with higher precision. The improvements are relevant for routine applications of multi-beam charged particle microscopes, for example in semiconductor inspection and review, where high reliability and high reproducibility and low machine-to-machine deviations are required.

Anmelder

Firma

Carl Zeiss MultiSEM GmbH

Land

🇩🇪 Deutschland

Fachgebiete