Messverfahren mit einem Rastertransmissionselektronenmikroskop, Rastertransmissionselektronenmikroskopsystem und Programm

Details

Veröffentlichungs-Nr.

EP4734149

Anmeldetag

21. Juni 2024

Veröffentlichung

26. Dezember 2024

Rechtsraum

EP

IPC

H01J37/28, G01N23/04

Abstract

A scanning transmission electron microscope system (100) includes: an irradiation source (102) configured to generate an electron beam (EB); a lens (104) configured to converge the electron beam (EB) onto a sample (S); a detector (106) configured to detect the electron beam (EB) transmitted through the sample (S), and acquire a detection signal which is a four-dimensional dataset represented by a two-dimensional scanning position on the sample (S) and two-dimensional coordinates on a detector plane; and a computer (108) configured to perform a Fourier transform on the detection signal acquired by the detector (106) with respect to the scanning position to obtain Fourier transform data of a complex number represented by a two-dimensional spatial frequency and the two-dimensional coordinates, calculate, for a specific spatial frequency, a thickness of the sample (S) and an inclination of the sample (S) with respect to a predetermined direction from an amplitude of the Fourier transform data, and calculate, for a specific spatial frequency, an aberration of the lens (104) from a phase of the Fourier transform data.

Anmelder

Firma

The University of Tokyo

Land

🇯🇵 Japan

Fachgebiete