Verfahren zur Herstellung eines Synthetischen Quarzglassubstrats

Details

Veröffentlichungs-Nr.

EP4737416

Anmeldetag

20. Oktober 2025

Veröffentlichung

6. Mai 2026

Rechtsraum

EP

IPC

C03C15/02, B24B1/00, B24B7/00(SHINETSU CHEMICAL CO et al.)

Abstract

Provided is a method for producing a synthetic quartz glass substrate, including an evaluation step of evaluating a depth of a machining damaged layer at a machined surface of a synthetic quartz glass substrate, and a removal step of removing the machining damaged layer on the basis of a result of evaluation of the depth of the machining damaged layer. A machining damaged layer is removed on the basis of evaluation of the depth of the machining damaged layer at a machined surface. The machining damaged layer can be reliably and efficiently removed, and the productivity of a synthetic quartz glass substrate can be improved.

Anmelder

Firma

SHIN-ETSU CHEMICAL CO., LTD.

Land

🇯🇵 Japan