Verfahren zur Bestimmung einer Verformungseigenschaft und Zugehörige Systeme

Details

Veröffentlichungs-Nr.

EP4738256

Anmeldetag

27. Oktober 2025

Veröffentlichung

6. Mai 2026

Rechtsraum

EP

Abstract

In an example, a method includes determining a characteristic displacement gradient (DG) tensor that characterizes a deformation characteristic. The method includes, in an iterative routine, calculating an objective function value associated with a trial DG tensor based, at least in part, on pixel values within a zone of consideration (ZOC) that is determined automatically based at least in part on the trial DG tensor. In another example, a method includes determining one or more rotational transformation components corresponding to a test image and determining a characteristic DG tensor based at least in part on the rotational transformation component(s). In another example, a system includes an electron optics assembly, a detector assembly, and a controller programmed to determine a characteristic DG tensor. In another example, a non-transitory computer readable medium stores instructions which, when executed by a computer, cause the computer to perform a method of determining a deformation characteristic.

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Firma

FEI COMPANY

Land

🇺🇸 USA