Drehtisch mit Piezoelektrischem Trägheitsantrieb
EP4738682
6. Mai 2026
Anmelder: Thorlabs, Inc. 🇺🇸
Details
- Veröffentlichungs-Nr.
- EP4738682
- Anmeldetag
- 28. Oktober 2025
- Veröffentlichung
- 6. Mai 2026
- Rechtsraum
- EP
- IPC
- H02N2/10(THORLABS INC et al.)(CULPI WILLIAM et al.)
Abstract
A piezoelectric inertial drive rotary stage including a piezoelectric inertial driver and a rotor (180). The driver includes a mounting portion (100), a friction portion (135, 136) coupling to the rotor, a movement portion (140) between the mounting portion and friction portion, a piezoelectric element (120) with first end bonded to the mounting portion and second end bonded to a movement portion, the movement portion transferring the motion of the piezoelectric element to the friction portion to drive the rotor.
Anmelder
- Firma
- Thorlabs, Inc.
- Land
- 🇺🇸 USA