Ofenrohr und Verwendungsverfahren dafür

Details

Veröffentlichungs-Nr.

EP4741748

Anmeldetag

9. September 2025

Veröffentlichung

13. Mai 2026

Rechtsraum

EP

Abstract

A furnace tube and a using method of the same are provided. The furnace tube comprises a chamber for processing a wafer; a normal-pressure gas intake device and a low-pressure gas intake device configured to supply gas to the chamber, wherein each of the normal-pressure gas intake device and the low-pressure gas intake device is independently connected to the chamber; a normal-pressure control device and a low-pressure control device configured to control an air pressure in the chamber, wherein each of the normal-pressure control device and the low-pressure control device is configured to independently control the air pressure in the chamber; and a normal-pressure gas injection pipe located inside the chamber and connected to the normal-pressure gas intake device, and a low-pressure gas injection pipe located inside the chamber and connected to the low-pressure gas intake device. The present disclosure achieves compatibility of normal-pressure and low-pressure process treatment through one furnace tube.

Anmelder

Firma

SwaySure Technology Co., Ltd.

Land

🇨🇳 China