Elektrodensubstratverarbeitungsvorrichtung und Elektrodensubstratverarbeitungsverfahren

Details

Veröffentlichungs-Nr.

EP4742308

Anmeldetag

14. Oktober 2025

Veröffentlichung

13. Mai 2026

Rechtsraum

EP

IPC

H01M4/04, H01M10/04

Abstract

A substrate processing apparatus includes an encoder configured to measure a substrate transport speed and a substrate transport position of a substrate being transported, a scanner configured to scan one surface of the substrate using light at predetermined time intervals, and a scanner control unit configured to control a scan trajectory based on the substrate transport speed and the substrate transport position, wherein the scanner control unit maintains a scan trajectory constant regardless of changes in the substrate transport speed by changing a scan speed of the scanner in real time.

Anmelder

Firma

SAMSUNG SDI CO., LTD.

Land

🇰🇷 Südkorea