Anordnung für Festkörperlaser

Details

Veröffentlichungs-Nr.

EP4742465

Anmeldetag

6. Februar 2026

Veröffentlichung

13. Mai 2026

Rechtsraum

EP

Abstract

An arrangement for pumping a gain medium of a solid-state laser to produce laser radiation during production periods separated by dormant periods. The arrangement comprises at least one radiation source and a source driver. The at least one radiation source is configured to provide production radiation of a production wavelength and compensation radiation of a compensation wavelength different from the production wavelength. The source driver is configured to drive the at least one radiation source to provide the production radiation at least during the production periods, wherein the source driver is further configured to drive the at least one radiation source to provide the compensation radiation so as to increase temperature uniformity of the gain medium.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande