Substratverarbeitungsvorrichtung und Überwachungsverfahren in der Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4742881

Anmeldetag

13. Januar 2023

Veröffentlichung

13. Mai 2026

Rechtsraum

EP

IPC

H10P72/00

Abstract

A substrate processing apparatus collectively processes a plurality of substrates with the plurality of substrates immersing in a processing liquid. The substrate processing apparatus includes a processing tank, a camera, and a controller. The processing tank stores the processing liquid. The camera is provided vertically higher above the processing tank and captures the inside of the processing tank to generate a plurality of items of captured image data. The controller generates smoothed image data obtained by smoothing a brightness distribution of waving caused on a liquid surface of the processing liquid based on integration of the plurality of items of captured image data, and monitors the inside of the processing tank based on the smoothed image data.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan