Substrathalter

Details

Veröffentlichungs-Nr.

EP4745666

Anmeldetag

14. November 2024

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

IPC

G03F7/00, H01L21/683(NAKIBOGLU GÜNES et al.)(LEE SANG KEE et al.)

Abstract

A substrate support configured to support a substrate. The substrate support, comprises a main body. The main body has a first side configured to support the substrate, and a second side opposite to the first side. A plurality of grooves is formed in the main body. The plurality of grooves comprises a first groove and a second groove longer than the first groove. The first groove is configured to impede a flow of fluid through the first groove in a first direction and to allow the flow of fluid through the first groove in a second direction, opposing the first direction.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete