Hp-Generator

Details

Veröffentlichungs-Nr.

EP4746023

Anmeldetag

13. November 2024

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

IPC

H01J37/32(ZIEMBA TIMOTHY et al.)

Abstract

A HP-generator (10) configured to deliver pulsed high power with a high voltage and/or high current to a capacitive load (8), particularly for a plasma process (9), comprising:a) a RF generating unit (3) in a first housing (42), configured to deliver RF power at an RF power output,b) a HV-pulsing unit (1) in a second housing (43), configured to generate pulsed high power using the RF power from the RF generating unit (3) and to supply this pulsed high power at an HV pulsing output,c) an RF power path for conducting RF current (47) from the RF generating unit (3) to the HV-pulsing unit (1), the RF-power-path (44) including a path filter element (45) with at least one inductive filter element (46), wherein the inductive filter element (46) is arranged to direct the RF current (47) from the RF generating unit (3) to the HV-pulsing unit (1) at least partially through the inductive filter element (46).

Anmelder

Firma

TRUMPF Huettinger Sp. Z o. o.

Land

🇵🇱 Polen

Fachgebiete