Hp-Generator

Details

Veröffentlichungs-Nr.

EP4746024

Anmeldetag

13. November 2024

Veröffentlichung

20. Mai 2026

Rechtsraum

EP

IPC

H01J37/32, H01J37/34(ZIEMBA TIMOTHY et al.)(LONG MAOLIN et al.)(MKS INSTR INC et al.)

Abstract

HP-generator (10) configured to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load (8), in particular to a plasma process (9), the HP-generator (10) comprising: a) a RF generating unit (3) in a first housing (42), configured to deliver RF-power at its RF-power output, b) a HV-pulsing unit (1) in a second housing (43), configured to generate pulsed high power with a high value of voltage and/or high current by using the RF-power from the RF generating unit (3), to supply this pulsed high power at its HV-pulsing-output (11), and to control the output power of the RF generating unit (3), c) a RF-power-path (47) for leading RF current (46) from the RF generating unit (3) to the HV-pulsing unit (1), d) a data communication line (33) between the RF generating unit (3) and the HV-pulsing unit (1), this data communication line (33) is configured to send control signals from the HV-pulsing unit (1) to the RF generating unit (3) in order to control the output power of the RF generating unit (3).

Anmelder

Firma

TRUMPF Huettinger Sp. Z o. o.

Land

🇵🇱 Polen

Fachgebiete