Kapazitiver Mikroelektromechanischer Druckwandler und Zugehöriges Herstellungsverfahren

Details

Veröffentlichungs-Nr.

EP4749254

Anmeldetag

11. November 2025

Veröffentlichung

27. Mai 2026

Rechtsraum

EP

IPC

G01L9/00, B81B3/00, B81C1/00

Abstract

MEMS pressure transducer (100) including: a semiconductor body (2); a fixed electrode region (12); and a membrane (155), which is suspended above the fixed electrode region (12) so as to delimit a cavity (39), the membrane (155) being deformable as a function of pressure. The membrane (155) includes: a lower conductive region (36) of polysilicon, which delimits the cavity (39) at the top and is traversed by one or more holes (38) which face the cavity (39), the lower conductive region (36) being impermeable to gases, except for the holes (38); an intermediate structure (146;246) of polysilicon permeable to gases, which closes the holes (38); and an upper conductive region (156) of polysilicon or amorphous silicon, which extends on the intermediate structure (146;246) and the lower conductive region (36) and is impermeable to gases. The membrane (155) is laterally delimited by a lateral surface (S<lat>), which is formed by the lower conductive region (36) and the upper conductive region (156); the intermediate structure (146;246) does not face the lateral surface (S<lat>) of the membrane (155).

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz