Optisches Element für Geladene Teilchen
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4749679
- Anmeldetag
- 20. November 2024
- Veröffentlichung
- 27. Mai 2026
- Rechtsraum
- EP
- IPC
- H01J37/147
Abstract
A charged particle-optical element configured to operate on a plurality of charged particle beams in a beam grid, the charged particle-optical element comprises: a first surface and a second surface, wherein each of the first surface and the second surface: has a plurality of apertures defined in it for allowing the beams to pass through, is angled relative to a plane perpendicular to an axis of the beam grid; and faces another surface of the charged particle-optical element at a potential difference, such that the charged particle-optical element is configured to apply a deflection to the beams by controlling the potential difference.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
3.336 Patente in unserer Datenbank
Vertreten von
-
ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven