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Details

Veröffentlichungs-Nr.

EP4752539

Anmeldetag

25. November 2025

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

G01N23/2251, H01J37/26

Abstract

CPB images, such as images obtained by using a pulsed electron beam in an electron microscope, are acquired with pulsed exposures of fields of view (FOVs) defined in a region of interest (202) of a sample (200). Multiple exposures are configured with a time interval greater than a phonon lifetime to reduce sample damage induced by the CPB exposure. FOVs can defined to be spaced apart to control effective irradiation dose based on a combination of direct exposure and evanescent exposure.

Anmelder

Firma

FEI COMPANY

Land

🇺🇸 USA

Fachgebiete