Kalibrierung einer Vorrichtung

Details

Veröffentlichungs-Nr.

EP4752629

Anmeldetag

28. November 2024

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

An apparatus comprising: a diffractive optical element; a primary radiation source configured to illuminate the diffractive optical element with primary radiation; and a reference radiation source configured to illuminate the diffractive optical element with reference radiation; wherein the diffractive optical element has a first periodicity configured to diffract the primary radiation, and a second periodicity configured to diffract the reference radiation. The apparatus further comprises: a detector arranged to detect the primary radiation diffracted by the diffractive optical element and the reference radiation diffracted by the diffractive optical element; and a processor configured to determine a wavelength related parameter of the detected primary radiation based on a wavelength related parameter of the detected radiation. A method for calibrating an apparatus, such as a metrology apparatus, is also described.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande