Verfahren zur Ausrichtung einer Reinigungseinheit mit einem zu Reinigenden Gegenstand und Vorrichtung zur Durchführung des Verfahrens

Details

Veröffentlichungs-Nr.

EP4752631

Anmeldetag

3. März 2026

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

G03F7/00

Abstract

A method of calibrating a cleaning position of an object to be cleaned with respect to a cleaning unit, the cleaning unit being configured to emit electromagnetic radiation measurable by a sensor, the method comprising the following steps: a) moving the sensor and/or the cleaning unit for the sensor to receive the electromagnetic radiation; b) measuring the electromagnetic radiation using the sensor; c) determining an alignment-improved position of the sensor with respect to the cleaning unit based on the measured electromagnetic radiation; d) determining the cleaning position of the object to be cleaned in accordance with the alignment-improved position of the sensor.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande