Substratverarbeitungsverfahren und Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4752830

Anmeldetag

12. Mai 2021

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

Abstract

A substrate processing method includes: a holding step of carrying a substrate into an inside of a chamber and holding said substrate; a supply step of supplying a fluid to the substrate on the inside of the chamber; an imaging step (S12) of sequentially imaging the inside of the chamber by a camera to acquire image data; a condition setting step (S11) of specifying a monitoring target from a plurality of monitoring target candidates in the chamber and changing an image condition based on the monitoring target; and a monitoring step (S13) of performing a monitoring process on the monitoring target based on the image data having the image condition corresponding to the monitoring target.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan