Verfahren, Vorrichtung, Optische Vorrichtung für Geladene Teilchen und Bewertungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4752928

Anmeldetag

29. November 2024

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

H01J37/153, H01J37/21

Abstract

The present invention provides a method of determining data representative of a focal surface of an array of charged particle beams and/or a height of a sample surface in a multi-beam charged particle-optical device, the method comprising: projecting beams onto a sample location at a first relative position; determining first individual focus values for individual beams; displacing the sample relative to the array of beams along a distance to a second relative position; determining second individual focus values for individual beams; displacing the sample relative to the array of beams along a distance to a third relative position; determining third individual focus values for individual beams in the array; and determining the data representative of the focal surface of the array of beams and/or the height of the sample surface based on the first individual focus values, the second individual focus values and the third individual focus values.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande