Optische Komponente für eine Optische Vorrichtung mit Geladenen Teilchen
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4752930
- Anmeldetag
- 29. November 2024
- Veröffentlichung
- 3. Juni 2026
- Rechtsraum
- EP
Abstract
The present invention provides an optical component for a charged particle-optical device. The device is configured to project one or more charged particle beams towards a sample. The optical component is configured to receive optical radiation from an external waveguide and to direct the optical radiation towards a sample. The optical component comprises a photonic element and a coupling element. The photonic element is configured to project optical radiation towards the sample. The coupling element is configured to optically couple an external waveguide to the photonic element, the coupling element comprising two facets that are mutually angled and an optical path between the two facets.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
3.336 Patente in unserer Datenbank
Vertreten von
-
ASML Netherlands B.V
ASML Netherlands B.V · Veldhoven