Elektrische Vorrichtung mit einem Kondensator mit einem Dielektrischen Stapel zur Vermeidung von Verziehen

Details

Veröffentlichungs-Nr.

EP4753397

Anmeldetag

28. November 2024

Veröffentlichung

3. Juni 2026

Rechtsraum

EP

IPC

H10D1/00, H10D1/68, H10D1/66

Abstract

The present invention relates to an electrical device comprising a capacitor including: a bottom electrode structure (110) comprising a silicon substrate (112), a dielectric stack (120) extending on the bottom electrode structure (110), the dielectric stack (120) comprising at least: a thermal silicon dioxide layer (121) on the silicon substrate having a thickness comprised between 10% and 20% of the thickness of the dielectric stack, a SixNy layer (122) on the thermal silicon dioxide layer having a thickness comprised between 45% and 55% of the thickness of the dielectric stack, and a deposited silicon dioxide layer (123)) on the SixNy layer having a thickness comprised between 35% and 45% of the thickness of the dielectric stack, a top electrode structure (130) extending on the dielectric stack (120).

Anmelder

Firma

MURATA MANUFACTURING CO., LTD.

Land

🇯🇵 Japan

Fachgebiete