Reinigungsprozessvorrichtung

Details

Veröffentlichungs-Nr.

EP4755580

Anmeldetag

3. Juli 2024

Veröffentlichung

6. Februar 2025

Rechtsraum

EP

Abstract

The present invention is a cleaning treatment apparatus 1 including a horn-type ultrasonic generator 5 that propagates ultrasonic waves to a cleaning liquid supplied to a polishing pad 109 of a polishing apparatus 100, the polishing apparatus 100 including a lower turn table 101, a sun gear 105 provided on an inside of the lower turn table 101, and an internal gear 107 provided on an outside of the lower turn table 101, the polishing pad 109 being attached to an upper surface of the lower turn table 101, in which the cleaning treatment apparatus 1 includes a rail 3 that is fixed on the sun gear 105 and the internal gear 107 across the lower turn table 101 and on which the ultrasonic generator 5 is mounted, the ultrasonic generator 5 is able to move on the rail 3, and the ultrasonic generator 5 generates ultrasonic waves by a horn 23 while moving on the rail 3, and performs the ultrasonic cleaning by propagating ultrasonic waves to the polishing pad 109 through the cleaning liquid. Thereby, a cleaning treatment apparatus that allows the ultrasonic cleaning while maintaining the interval between the horn and the polishing pad with high accuracy, even in the case where the horn-type ultrasonic generator is included is provided.

Anmelder

Firma

Shin-Etsu Handotai Co., Ltd.

Land

🇯🇵 Japan