Gespritzte Folie, Verfahren zur Formung davon und Gespritztes Element

Details

Veröffentlichungs-Nr.

EP4756067

Anmeldetag

20. November 2025

Veröffentlichung

10. Juni 2026

Rechtsraum

EP

Abstract

A sprayed film including a film surface in which a value of an area ratio S/A obtained by dividing a surface area S (µm²) of a portion of the measurement surface (S-L surface) of the film surface within one evaluation region by an area A (µm²) of a portion of a reference surface forming a plane located at an arithmetic average height of the measurement surface (S-L surface), which is within the evaluation region is 1.75 or more and 3 or less, and a surface roughness Sa of a portion of the measurement surface (S-L surface) within the evaluation region is 0.4 µm or more and 8 µm or less.Generation of particles which is caused by cracks of the sprayed film can be reduced when dry etching using gas plasma is performed with a semiconductor manufacturing apparatus or the like using the sprayed film as a corrosion-resistant film.

Anmelder

Firma

SHIN-ETSU CHEMICAL CO., LTD.

Land

🇯🇵 Japan