Verfahren zur Abscheidung eines Metalls auf eine Probe durch Fokussierte, durch einen Strahl Geladener Teilchen Induzierte Abscheidung

Details

Veröffentlichungs-Nr.

EP4756071

Anmeldetag

4. Dezember 2024

Veröffentlichung

10. Juni 2026

Rechtsraum

EP

Abstract

The present invention provides a method for depositing a metal or metal oxide onto a sample by focused charged particle beam induced deposition, wherein the sample is introduced into a working chamber of a focused charged particle beam device, and subjected to processing by a beam containing focused charged particles and by a stream of a gaseous precursor of the metal or metal oxide to be deposited and water vapor, wherein the gaseous precursor of the metal or metal oxide to be deposited and water vapor are produced in one reservoir from a liquid or solid precursor of the metal or metal oxide to be deposited and from a liquid or solid precursor of water vapor, and introduced from the reservoir into the working chamber by a single nozzle.

Anmelder

Firma

Orsay Physics

Land

🇫🇷 Frankreich