Kapazitiver Sensor

Details

Veröffentlichungs-Nr.

EP4756392

Anmeldetag

15. August 2024

Veröffentlichung

24. April 2025

Rechtsraum

EP

IPC

G01L5/165

Abstract

A capacitive sensor that detects, on the basis of a change in electrostatic capacity of an electrode unit constituted by a first comb-tooth structure and a second comb-tooth structure facing the first comb-tooth structure, a force that acts in at least one of a first direction, a second direction intersecting the first direction, and a third direction intersecting both the first direction and the second direction includes: a first substrate layer (40) in which a thickness direction is the third direction, the first substrate layer (40) including a boss portion (40A) that receives a force that acts in the at least one direction and being deformed by bending due to a force that acts on the boss portion (40A); and a second substrate layer (30) in which a thickness direction is the third direction, the second substrate layer (30) including a mass portion (60) to which a force that acts in the at least one direction is transmitted from the boss portion (40A), a movable electrode that has the first comb-tooth structure and that is displaced in conjunction with the mass portion (60), and a fixed electrode that has the second comb-tooth structure.

Anmelder

Firma

Murata Manufacturing Co., Ltd.

Land

🇯🇵 Japan