Substratverarbeitungsvorrichtung und Informationsverarbeitungsverfahren für die Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4756718

Anmeldetag

31. Mai 2024

Veröffentlichung

6. Februar 2025

Rechtsraum

EP

IPC

G06T7/70, H01L21/304

Abstract

In order to efficiently recognize a posture of a component, reference shape information on a two-dimensional shape of a three-dimensional model in a virtual image that can be acquired by imaging the three-dimensional model of a component to be searched is acquired for each of a plurality of first virtual camera positions located along a plurality of virtual spherical surfaces surrounding the three-dimensional model of the component to be searched and corresponding to one or more initial setting ranges for the component to be searched defined by setting range information, based on three-dimensional design information regarding the component to be searched among one or more target components and the setting range information defining the one or more initial setting ranges related to a virtual camera position with respect to a target component set in advance. For each first virtual camera position, a numerical value indicating a matching degree between real shape information on the two-dimensional shape of an object in a real image obtained by capturing the component to be searched and the reference shape information is calculated. Among the plurality of first virtual camera positions, a virtual camera position having the highest matching degree between the real shape information and the reference shape information is detected.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan