Elektronenmikroskop und Probenbeobachtungsverfahren

Details

Veröffentlichungs-Nr.

EP4756861

Anmeldetag

18. November 2025

Veröffentlichung

10. Juni 2026

Rechtsraum

EP

Abstract

An electron microscope (100) includes: an electron source (10) that emits an electron beam; an electrostatic/electromagnetic field superposed objective lens (20) in which an acceleration tube (240) is built into a magnetic field lens; a correction electrode (50) placed between the acceleration tube (240) and a specimen (S); and a specimen stage (30) that tiltably supports the specimen (S), wherein a positive voltage is applied to the acceleration tube (240), a negative voltage is applied to the correction electrode (50), and a potential on an optical axis (A) between the correction electrode (50) and the specimen (S) is equal to or higher than a potential of the specimen (S).

Anmelder

Firma

JEOL Ltd.

Land

🇯🇵 Japan