Substratverarbeitungsvorrichtung

Details

Veröffentlichungs-Nr.

EP4757569

Anmeldetag

10. November 2025

Veröffentlichung

10. Juni 2026

Rechtsraum

EP

IPC

H10P72/00

Abstract

A brush device is attachable to and detachable from a brush holder. The brush holder is moved by a movement device. A brush of the brush device is pressed against an upper surface of a substrate held by a substrate holding device, and the substrate is cleaned. In a substrate cleaning device, with one brush device attached to the brush holder, another brush device is stored in a brush storage device. The brush holder is moved by a movement device to the brush storage device after an old brush device is detached. Another brush device is attached to the brush holder. The movement device includes an arm rotation driver and an arm movement driver that move the brush holder in two respective different directions.

Anmelder

Firma

SCREEN Holdings Co., Ltd.

Land

🇯🇵 Japan