Sensor zur Gasdetektion in Luft

Details

Veröffentlichungs-Nr.

EP4760247

Anmeldetag

5. Dezember 2025

Veröffentlichung

17. Juni 2026

Rechtsraum

EP

IPC

G01N25/18, G01N33/00

Abstract

Sensor (30), of the micro-electromechanical type, for detecting a target gas in air, the sensor (30) comprising: a main body (32) defining a first cavity (34'), buried in the main body (32) and in fluidic communication with an environment external to the sensor (30) in such a way as to allow the flow of air from the external environment towards the first cavity (34'), the main body (32) comprising a first frame portion (42') facing the first cavity (34'); a first suspended mass (38'), suspended in the first cavity (34') and comprising at least one thermally isolated metal-oxide semiconductor (TMOS) transistor (20), configured to detect the target gas in air, and at least one heater element (22), configured to heat the first suspended mass (38'); and a first elastic group (40') extending in the first cavity (34') between the first suspended mass (38') and the first frame portion (42'), the first elastic group (40') being configured to elastically couple the first suspended mass (38') to the first frame portion (42').

Anmelder

Firma

STMicroelectronics International N.V.

Land

🇨🇭 Schweiz