Lösung von Inversen Problemen durch Stochastische Optimale Steuerung

Details

Veröffentlichungs-Nr.

EP4760395

Anmeldetag

11. Dezember 2024

Veröffentlichung

17. Juni 2026

Rechtsraum

EP

Abstract

A method of processing pattern data to data to generate description data is provided. The pattern data is informative about a patterned portion of a substrate, and the description data characterizes a model of the patterned portion of the substrate or of a lithographic apparatus operative to produce the patterned portion of the substrate. The method comprises i) obtaining the pattern data, ii) generating initial description data, and iii) at each of a plurality of iterations, updating the current description data by providing the current description data to an input of a trained controller module conditioned on the pattern data to generate first adjustment data to the current description data, randomly selecting second adjustment data to the current description data; and determining updated description data based on the current description data and the first and the second adjustment data.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande