Gassensorkalibrierungssystem und -Verfahren

Details

Veröffentlichungs-Nr.

EP4760396

Anmeldetag

11. Dezember 2024

Veröffentlichung

17. Juni 2026

Rechtsraum

EP

IPC

G03F7/20, G01N33/00

Abstract

A gas sensor calibration system, comprising:an environment;a gas sensor, wherein the gas sensor is configured to measure a first signal of a first gas when the environment is filled with the first gas, and a second signal of a second gas when the environment is filled with the second gas;a pressure gauge, configured to measure a first pressure within the environment when the environment is filled with the first gas, and to measure a second pressure within the environment when the environment is filled with the second gas;a data processor, configured to calculate a sensitivity correction factor for the second gas based on the first signal, second signal, first pressure and second pressure.

Anmelder

Firma

ASML Netherlands B.V.

Land

🇳🇱 Niederlande

Fachgebiete