Gassensorkalibrierungssystem und -Verfahren
Anmelder: ASML Netherlands B.V. 🇳🇱
Details
- Veröffentlichungs-Nr.
- EP4760396
- Anmeldetag
- 11. Dezember 2024
- Veröffentlichung
- 17. Juni 2026
- Rechtsraum
- EP
- IPC
- G03F7/20, G01N33/00
Abstract
A gas sensor calibration system, comprising:an environment;a gas sensor, wherein the gas sensor is configured to measure a first signal of a first gas when the environment is filled with the first gas, and a second signal of a second gas when the environment is filled with the second gas;a pressure gauge, configured to measure a first pressure within the environment when the environment is filled with the first gas, and to measure a second pressure within the environment when the environment is filled with the second gas;a data processor, configured to calculate a sensitivity correction factor for the second gas based on the first signal, second signal, first pressure and second pressure.
Anmelder
- Firma
- ASML Netherlands B.V.
- Land
- 🇳🇱 Niederlande
Niederländisches Unternehmen, das Lithografiesysteme und weitere Anlagen für die Halbleiterfertigung entwickelt und herstellt, zentral für die Chipindustrie.
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ASML Netherlands B.V.