Fokussierte Ionenstrahlsysteme mit Mehrpoligen Elementen und Verzögerungselementen

Details

Veröffentlichungs-Nr.

EP4760769

Anmeldetag

9. Dezember 2025

Veröffentlichung

17. Juni 2026

Rechtsraum

EP

IPC

H01J37/153, H01J37/12

Abstract

Charged particle microscope systems including multipole optics are described. An ion-optical column can include an aberration correction system. The aberration correction system can be disposed on an axis and can include a multipole condenser. The multipole condenser can include one or more condenser quadrupole-generating elements. The aberration correction system can also include a multipole objective. The multipole objective can include a plurality of objective multipole elements. The ion-optical column can include an objective lens assembly, disposed on the axis. The ion-optical column can also include a deceleration element. The deceleration element can be disposed on the axis between at least a portion of the aberration correction system and a sample position external to the charged particle optical column.

Anmelder

Firma

FEI Company

Land

🇺🇸 USA